"MEMS: Lab claims world's best MEMS sensor"
Panos Datskos at Oak Ridge National Laboratory in Tennessee is claiming a new world's record by detecting just 5.5 femtograms with the Lab's silicon micro-electro-mechanical-system (MEMS) sensor. Measuring just 2 microns long by 50 nanometers thick, the silicon cantilevers�like the teeth of a comb�were vibrated by an inexpensive diode laser. Measurements of the frequency of oscillation confirmed that the sensor had detected just 5.5 femtograms.
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Text: http://www.eet.com/at/m/news/OEG20030612S0020